T&D World Magazine

Electrostatic Voltmeter Has Millivolt Resolution

Trek has introduced the Model 325 electrostatic voltmeter, an ultra-sensitive instrument suitable for noncontacting electrostatic voltage measurement and monitoring in applications within high-tech, semiconductor, materials processing, materials science and R&D sectors.

This versatile instrument was specifically designed to be used in applications that require accurate, low-noise, noncontacting measurement of electrostatic voltages from millivolts to +/- 40 V over a wide range of probe-to-surface distances.

In high-tech manufacturing, applications include electrostatic monitoring of devices sensitive to electrostatic discharge (ESD), and testing of the reliability and characteristics of dielectric materials and films in electronic applications.

In materials science and R&D, applications include contact potential (surface work function) determination, materials evaluation and electret studies.

Features of Model 325 include sensitivity of 1 mV, speed of response less than 3 ms, and accuracy better than 0.05% of full scale. Trek's low impedance probe sensor assures measurement accuracy, which is essentially independent of probe-to-test-surface spacing while eliminating the external environmental effects of high humidity and contamination on measurement accuracy. Contaminants include airborne dust, ions, chemicals and other particulates.

Model 325 Electrostatic Voltmeter offers a higher performance alternative to the company’s Model 320C electrostatic voltmeter. While Model 320C measures to a higher voltage range (+/- 100 V), Model 325 offers faster speed of response, lower noise and higher accuracy. The new model’s smaller probe also increases the unit’s utility in space-constrained environments. The Model 325 was designed to address the ever-more-demanding semiconductor parameters for permittivity, oxide thickness and integrity, contact potentials and higher-speed automated voltage profile scanning.

Special features of the Model 325 allow tuning the performance of the unit to compensate for specific test conditions. Model 325 can be operated as a bench top unit or in a standard rack (with optional hardware).

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